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MCL三轴纳米位移台M350技术参数
| 品牌 | MCL Think Nano | 型号 | Nano-M350 |
MCL三轴纳米位移台M350详细介绍
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Features
 | Typical Applications
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Product Description |
The Nano-M350 is a compact three axis (X, Y, Z) nanopositioning system constructed from aluminum combined with titanium or constructed completely from invar for the highest degree of thermal stability. The compact design of the Nano-M350 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M350 is also available in high vacuum (non-bakeable) compatible models. |
Technical Specifications | |
| Range of motion (X) | 50 μm |
| Range of motion (Y) | 50 μm |
| Range of motion (Z) | 25 μm |
| Resolution (25/50 μm) | 0.05/0.1 nm |
| Resonant Frequency (X) | 1 kHz ±20% |
| Resonant Frequency (Y) | 700 Hz ±20% |
| Resonant Frequency (Z) | 700 Hz ±20% |
| Stiffness | 1.0 N/μm |
| θroll, θpitch(typical) | ≤1 μrad |
| θyaw(typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Al and Titanium, or Invar |
| Controller | Nano-Drive |
| * Larger load requirements 首ld be discussed with our engineering staff. | |
Additional Information | |
Nano-M350 Drawing | Nano-M350 Catalog Pages |
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