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MCL 提示/倾斜、旋转纳米位移台Align3 系列
品牌MCL Think Nano
型号Nano-Align3 Series
同类产品(196件)
供应商报价

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所在地美洲 美国
北京欧兰科技发展有限公司

第1年

企业类型:国有
所在地:北京 海淀区

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更新时间:2024-06-22 09:42:20
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MCL 提示/倾斜、旋转纳米位移台Align3 系列技术参数
品牌 MCL Think Nano 型号 Nano-Align3 Series
MCL 提示/倾斜、旋转纳米位移台Align3 系列详细介绍


Features
  • Low profile: 0.8"

  • Three axis motion (Z θXθY)

  • Large center aperture: 2.6" x 2.6"

  • Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θXθY)

  • Closed loop control



Typical Applications
  • Z-axis plus tip/tilt alignment

  • Nanolithography

  • Microscopy

  • MEMS


Z tip tilt piezo stage

Product Description

The Nano-Align3 is a three axis (Z, θX, θY) nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQtechnology provide picometer and nanoradian precision under closed loop control.



Technical Specifications

Ranges of motion (Nano-Align3-100)
Z axis
100 μm
θXand θY2 mradian
Ranges of motion (Nano-Align3-200)
Z axis200 μm
θXand θY4 mradian
Resolution (Nano-Align3-100)0.2nm/ 4 nradian
Resolution (Nano-Align3-200)0.4nm/ 8 nradian
Resonant Frequency (Nano-Align3-100)600 Hz ±20%
Resonant Frequency (Nano-Align3-200)450 Hz ±20%
Stiffness1.0 N/μm
Recommended max. load (horizontal)*0.5 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialAluminum, Titanium, or Invar
ControllerNano-Drive/Nano-Drive85
* Larger load requirements 首ld be discussed with our engineering staff.



Additional Information

Nano-Align3 Series Drawing
drawing of Z tip tilt piezo stage
Nano-Align3 Series Catalog Pages
Nano-Align3 catalog pages



Related Products

  • Nano-Align5 Series

  • Nano-Align6 Series

  • Nano-Man5

  • Nano-M3Z

  • Nano-ZS Series

  • Accessories

  • Nano-Drive


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