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MCL提示/倾斜、旋转纳米位移台Man5
品牌MCL Think Nano
型号Nano-Man5
同类产品(196件)
供应商报价

面议

所在地美洲 美国
北京欧兰科技发展有限公司

第1年

企业类型:国有
所在地:北京 海淀区

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更新时间:2024-06-22 09:42:20
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MCL提示/倾斜、旋转纳米位移台Man5技术参数
品牌 MCL Think Nano 型号 Nano-Man5
MCL提示/倾斜、旋转纳米位移台Man5详细介绍


Features
  • Compact size

  • Five axis motion (XYZ θXθY)

  • 50 μm x 50 μm x 25 μm x 1mrad x 1mrad

  • ranges of motion

  • Center aperture: 0.25"

  • Closed loop control



Typical Applications
  • Alignment

  • MEMS

  • Nanolithography

  • SEM




Product Description

The Nano-Man5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a 0.25” diameter center aperture. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.



Technical Specifications

Range of motion (X)50 μm
Range of motion (Y)
50 μm
Range of motion (Z)25 μm
Range of motion (θX)1 mradian
Range of motion (θY)1 mradian
Resolution (X)0.1 nm
Resolution (Y)0.1 nm
Resolution (Z)0.05 nm
Resolution (θX)2 nradian
Resolution (θY)2 nradian
Resonant Frequency (X)1 kHz ±20%
Resonant Frequency (Y)700 Hz ±20%
Resonant Frequency (Z)700 Hz ±20%
Stiffness1.0 N/μm
Recommended max. load (horizontal)*0.2 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialAl and Titanium, or Invar
ControllerNano-Drive
* Larger load requirements 首ld be discussed with our engineering staff.



Additional Information

Nano-Man5 Drawing

Nano-Man5 Catalog Pages



Related Products

  • Nano-Align5 Series

  • Nano-Align3 Series

  • Nano-M3Z

  • Nano-M250

  • Nano-M350

  • Accessories

  • Nano-Drive


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