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波前传感器技术参数
| 品牌 | Metrolux | 型号 | ML4560 波前传感器 |
波前传感器详细介绍
技术参数：
Specifications Sensor Head ML4010波前传感器
| CCD-Sensor | 2/3” |
| Dynamic | 12bit |
| Pixel # | 1392 x 1040 |
|
Wavelength range |
350 nm - 1100 nm |
| Pupil size | 8.97 x 6.71 mm |
| Max. frame rate | 15 fps |
| Spatial Resolution | 200 μm |
| Number of Sub Apertures | 45 x 34 |
| Dynamic Range (Tilt) | ± 1,6° (730 lamda) |
| Wavefront Accuracy | < 16 μrad |
| Dynamic Range (Focus) | 72 mm (370 lamda) |
| Accuracy | 5 x 10-4 /m |
| System Accuracy | 10 nm |
| Repeatability | 100 nm |
| Wavefront Accuracy | 50 nm |
主要特点：
raylux software ML1205
快速在线波前计算
Computation of Zernike polynomial terms (tilt, defocus, astigmatism,...)
Automatic gain and shutter control
Automatic synchronization with pulsed lasers
Noise and background control
Decrease measurement errors by averaging
Numerical data files of wavefront
2D/3D display of wavefront viewable
from any angle or elevation with zoom
Progression view (time dependent view
of all important parameters)
M2 and beam divergence analysis
Additional beam analysis in compliance to ISO
Far field analysis
Near field analysis
Store and recall screens
in single or video fashion
Fully flexible screen format including save
configuration
