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Metrolux 紫外激光光束分析仪技术参数
| 品牌 | Metrolux | 型号 | Metrolux-01 |
Metrolux 紫外激光光束分析仪详细介绍
技术参数：
紫外激光光束分析仪(UV - Laser Beam Profiler)
可用于准分子激光器和 Nd：YAG 激光器的高次谐波
相机系统：
• 高动态范围
• 高分辨率紫外转换器
• Homogeneity up to > 98 % over active area
• 延迟时间短
• 损伤阈值高达15 J/cm²
• 单脉冲探测频率达1 KHz(由转换器的延迟时间决定)
| Laser | Wavelength | beam size | ||||||||
| F2 | 157 nm | |||||||||
| ArF | 153 nm | |||||||||
| NdYag 5th | 213 nm | < 1mm | < 5x4 | < 9x6 | < 13x9 | < 18x13 | < 27x20 | <35x27 | <43x32 | < 50x38* |
| KrF | 248 nm | Laser spot | ||||||||
| NdYag 4th | 266 nm | |||||||||
| XeCI | 308 nm | ML5222 10x | direct | ML5201 | ML5202 | ML5203 | ML5204 | ML5205 | ML5206 | ML5207 |
| XeF | 351 nm | ML5223 20x | ||||||||
| NdYag 3rd | 355 nm | ML5224 40x |
* (larger sizes available on request, up to 200 mm
| Software | ML1201 | beamlux II advanced | |
| Camera | ML3720 | 1/2” CCD 782 x 582 | |
| ML3743 | 2/3” CCD 1392 x 1040 |
主要特点：
Features
• 可测量所有的准分子激光器
• 在线质量控制
• real time evaluation of the laser with 1/10th of a second
• Synchronizes up to three cameras simultaneously for measurement of raw beam and processing plane
• TCP/IP remote control to control your laser system from your desk
