The Nano-M3Z is a compact, three axis (Z, θX, θY) nanopositioning system with a 0.25” center aperture. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The center aperture provides an optical path for laser interferometry or tracking. Nano-M3Z’s can be constructed from aluminum or from invar to reduce themal expansion effects. A related model, the Nano-Man5, adds linear X and Y motion to the the Z-axis capabilities of the Nano-M3Z.
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MCL提示/倾斜、旋转纳米位移台M3Z技术参数
MCL提示/倾斜、旋转纳米位移台M3Z详细介绍
