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MCL纳米双轴、三轴位移台T系列技术参数
品牌 | MCL Think Nano | 型号 | Nano-T Series |
MCL纳米双轴、三轴位移台T系列详细介绍
Features
| Typical Applications
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Product Description |
The Nano-T Series are economical, multi-axis nanopositioning systems which are available in a variety of configurations. The Nano-T Series have up to 200 microns range of motion in X and Y, and up to 50 microns in Z. The large center aperture accomodates lenses and probes without compromising performance. Internal position sensors utilizing proprietary PicoQtechnology provide absolute, repeatable position measurement and picometer accuracy under closed loop control. The Nano-T Series is well suited to applications in which precise positioning is required but the overall stage height is not critical. If extremely low profile systems are required, both theNano-Bio2and theNano-LP Series首ld be considered. Compatible Software Packages: |
Technical Specifications | |
Range of motion (X, Y) | 100 μm/200 μm |
Range of motion (Z) | 20 μm/50 μm |
Resolution XY (100/200 μm) | 0.2/0.4 nm |
Resolution Z (20/50 μm) | 0.04/0.1 nm |
Resonant Frequencies | |
X axis (100/200 μm) | 450/400 Hz ±20% |
Y axis (100/200 μm) | 250/200 Hz ±20% |
Z axis (20/50 μm) | 450/350 Hz ±20% |
Stiffness | 1.0 N/μm |
θroll, θpitch(typical) | ≤1 μrad |
θyaw(typical) | ≤3 μrad |
Recommended max. load (horizontal)* | 0.5 kg |
Recommended max. load (vertical)* | 0.2 kg |
Body Material | Al or Invar |
Controller | Nano-Drive |
* Larger load requirements 首ld be discussed with our engineering staff. |
Additional Information | |
Nano-T Series (2 Axis) Drawing Nano-T Series (3 Axis) Drawing | Nano-T Series Catalog Pages |
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