MCL 提示/倾斜、旋转纳米位移台Align5 系列_北京欧兰科技发展有限公司-仪器设备网

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详细介绍

MCL 提示/倾斜、旋转纳米位移台Align5 系列技术参数

品牌	MCL Think Nano	型号	Nano-Align5 Series

MCL 提示/倾斜、旋转纳米位移台Align5 系列详细介绍

Features

Low profile
Five axis motion (XYZ θX θY)
100 μm, 200 μm, or 300 μm motion in XYZ
Up to 3.3mrad motion in θX , and up to 4.5 mrad motion in θY
Center aperture: 2.6" x 2.6"
Closed loop control

Typical Applications

Alignment
MEMS
Nanolithography
Metrology

XYZ tip tilt nanopositioning system five axis tip tilt piezo stage with manual micrometer stage
Product Description

The Nano-Align5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a large center aperture. The Nano-Align5 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with “tip” and “tilt” (θXθY). The large center aperture provides excellent access for microscopy optics, sample Nano-Align5 constructed from aluminum. holders, and probe placement. The Nano-Align5 includes internal sensors with proprietary PicoQ®technology for absolute position measurement and picometer/ nanoradian accuracy under closed loop control. The Nano-Align5 can be combined with the MicroStage and Manual MicroStage for long range micropositioning.

Technical Specifications
Ranges of motion (Nano-Align5-100)	100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY)
Ranges of motion (Nano-Align5-200)	200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY)
Ranges of motion (Nano-Align5-300)	300 x 300 x 300 μm x 3.3 mrad (θX) x 4.5 mrad (θY)
Resolution (Nano-Align5-100)	0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY)
Resolution (Nano-Align5-200)	0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY)
Resolution (Nano-Align5-300)	0.6 nm (XYZ), 6.6 nrad (θX), 9.0 nrad (θY)
Resonant Frequencies
X axis (100/200/300 μm)	450/400/350 Hz ±20%
Y axis (100/200/300 μm)	350/300/250 Hz ±20%
Z axis (100/200/300 μm)	450/350/250 Hz ±20%
Stiffness	1.0 N/μm
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Aluminum (all models), Invar or Titanium (100 or 200μm only)
Controller	Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-Align5 Series Drawing	Nano-Align5 Series Catalog Pages

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