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MCL纳米双轴、三轴位移台T系列技术参数
品牌 | MCL Think Nano | 型号 | Nano-T Series |
MCL纳米双轴、三轴位移台T系列详细介绍
Features
| Typical Applications
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Product Description |
The Nano-T Series are economical, multi-axis nanopositioning systems which are available in a variety of configurations. The Nano-T Series have up to 200 microns range of motion in X and Y, and up to 50 microns in Z. The large center aperture accomodates lenses and probes without compromising performance. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement and picometer accuracy under closed loop control. The Nano-T Series is well suited to applications in which precise positioning is required but the overall stage height is not critical. If extremely low profile systems are required, both the Nano-Bio2 and the Nano-LP Series should be considered. Compatible Software Packages: |
Technical Specifications | |
Range of motion (X, Y) | 100 μm/200 μm |
Range of motion (Z) | 20 μm/50 μm |
Resolution XY (100/200 μm) | 0.2/0.4 nm |
Resolution Z (20/50 μm) | 0.04/0.1 nm |
Resonant Frequencies | |
X axis (100/200 μm) | 450/400 Hz ±20% |
Y axis (100/200 μm) | 250/200 Hz ±20% |
Z axis (20/50 μm) | 450/350 Hz ±20% |
Stiffness | 1.0 N/μm |
θ roll, θ pitch (typical) | ≤1 μrad |
θ yaw (typical) | ≤3 μrad |
Recommended max. load (horizontal)* | 0.5 kg |
Recommended max. load (vertical)* | 0.2 kg |
Body Material | Al or Invar |
Controller | Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |
Additional Information | |
Nano-T Series (2 Axis) Drawing Nano-T Series (3 Axis) Drawing | Nano-T Series Catalog Pages |
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