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MCL 纳米双轴、三轴位移台HS系列技术参数
| 品牌 | MCL Think Nano | 型号 | Nano-HS Series |
MCL 纳米双轴、三轴位移台HS系列详细介绍
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Features
 | Typical Applications
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Product Description |
The Nano-HS Series is a high speed, multi-axis, precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano-HS can be configured to provide XY or XYZ motion. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications that require noise floors less than 10 picometers and/or high speed performance. The Nano-HS2 is an ideal high speed XY scanning stage for use with the MadPLL® system. See the SPM-M Kit for an example of how to combine Mad City Labs equipment to build an AFM or NSOM. For an XYZ system with even higher speed Z, see the Nano-HS3M. |
Technical Specifications | |
| Range of motion (XYZ) | 10 μm |
| Resolution | 0.01 nm |
| XY (HS2) Resonant Frequency | 1.5 kHz ±20% |
| XY (HS3) Resonant Frequency | 1.0 kHz ±20% |
| Z (HS3) Resonant Frequency | 5.0 kHz ±20% |
| Scanning Speed | up to 300 Hz |
| Stiffness (Z-axis) | 8 N/μm |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Al, Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum | ||
| The Nano-HS Series demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis. | ||
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Additional Information | |
Nano-HS2 Drawing Nano-HS3 Drawing  | Nano-HS Series Catalog Pages |
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