Features Compact size Five axis motion (XYZ θX θY) 50 μm x 50 μm x 25 μm x 1mrad x 1mrad ranges of motion Center aperture: 0.25" Closed loop control

Typical Applications Alignment MEMS Nanolithography SEM

Product Description

The Nano-Man5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a 0.25” diameter center aperture. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.

Technical Specifications

Additional Information
Nano-Man5 Drawing	Nano-Man5 Catalog Pages

Related Products

• Nano-Align5 Series

• Nano-Align3 Series

• Nano-M3Z

• Nano-M250

• Nano-M350

• Accessories

• Nano-Drive®