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MCL三轴纳米位移台M350
品牌MCL Think Nano
型号Nano-M350
同类产品微定位位移台(82件)
供应商报价

面议

所在地美洲 美国
北京欧兰科技发展有限公司

第1年

企业类型:国有
所在地:北京 海淀区

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经营业务:
更新时间:2024-06-22 09:42:20
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MCL三轴纳米位移台M350技术参数
品牌 MCL Think Nano 型号 Nano-M350
MCL三轴纳米位移台M350详细介绍

Features
  • Compact size

  • Three axis motion (XYZ)

  • 50 μm x 50 μm x 25 μm ranges of motion

  • Center aperture: 0.25"

  • Closed loop control



Typical Applications
  • Alignment

  • MEMS

  • Nanolithography

  • SEM


Product Description

The Nano-M350 is a compact three axis (X, Y, Z) nanopositioning system constructed from aluminum combined with titanium or constructed completely from invar for the highest degree of thermal stability. The compact design of the Nano-M350 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M350 is also available in high vacuum (non-bakeable) compatible models.


Technical Specifications

Range of motion (X)

50 μm

Range of motion (Y)
50 μm
Range of motion (Z)25 μm
Resolution (25/50 μm)0.05/0.1 nm
Resonant Frequency (X)1 kHz ±20%
Resonant Frequency (Y)700 Hz ±20%
Resonant Frequency (Z)700 Hz ±20%
Stiffness1.0 N/μm
θ roll, θ pitch (typical)≤1 μrad
θ yaw (typical)≤3 μrad
Recommended max. load (horizontal)*0.5 kg
Recommended max. load (vertical)*0.2 kg
Body MaterialAl and Titanium, or Invar
ControllerNano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Related Products

  • Nano-M250

  • Nano-Man5

  • Nano-M3Z

  • Nano-MZ

  • Nano-3D200

  • Nano-HS Series

  • Accessories

  • Nano-Drive®


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