Features UHV compatible construction Two axis (XY), large aperture 100 μm x 100 μm ranges of motion Bakeable to 100° C Titanium or invar construction Closed loop control

Typical Applications X-ray, VUV, and optical microscopy Surface metrology UHV atomic scale microscopy Special designs - just contact us with your requirements

Product Description

The Nano-UHV100 is a two axis UHV compatible nanopositioning stage constructed from titanium or invar. Made entirely from UHV compatible materials, the Nano-UHV100 can be baked to 100°C for vacuum applications in the 10-10Torr range. The large (2.6” x 2.6”) center aperture makes the Nano-UHV100 ideal for vacuum microscopy applications. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.

Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.

Additional Information
Nano-UHV100 Drawing	Nano-UHV100 Catalog Pages

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