MCL 提示/倾斜、旋转纳米位移台Align3 系列_北京欧兰科技发展有限公司-仪器设备网

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详细介绍

MCL 提示/倾斜、旋转纳米位移台Align3 系列技术参数

品牌	MCL Think Nano	型号	Nano-Align3 Series

MCL 提示/倾斜、旋转纳米位移台Align3 系列详细介绍

Features

Low profile: 0.8"
Three axis motion (Z θX θY)
Large center aperture: 2.6" x 2.6"
Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θXθY)
Closed loop control

Typical Applications

Z-axis plus tip/tilt alignment
Nanolithography
Microscopy
MEMS

Z tip tilt piezo stage
Product Description

The Nano-Align3 is a three axis (Z, θX , θY) nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ® technology provide picometer and nanoradian precision under closed loop control.

Technical Specifications
Ranges of motion (Nano-Align3-100)
Z axis	100 μm
θX and θY	2 mradian
Ranges of motion (Nano-Align3-200)
Z axis	200 μm
θX and θY	4 mradian
Resolution (Nano-Align3-100)	0.2nm/ 4 nradian
Resolution (Nano-Align3-200)	0.4nm/ 8 nradian
Resonant Frequency (Nano-Align3-100)	600 Hz ±20%
Resonant Frequency (Nano-Align3-200)	450 Hz ±20%
Stiffness	1.0 N/μm
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Aluminum, Titanium, or Invar
Controller	Nano-Drive®/Nano-Drive®85
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-Align3 Series Drawing	Nano-Align3 Series Catalog Pages

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