MCL 纳米线性位移台LR200_北京欧兰科技发展有限公司-仪器设备网

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技术参数
详细介绍

MCL 纳米线性位移台LR200技术参数

品牌	MCL Think Nano	型号	NanoLR200

MCL 纳米线性位移台LR200详细介绍

Features

Long range single axis motion: 200 μm
Less than 5 nm out of plane motion
Low profile design
Closed loop control

Typical Applications

Surface metrology
Wafer scanning and alignment
Optical alignment

Product Description

The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ? technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.

Technical Specifications
Range of motion (X)	200 μm
Resolution	0.4 nm
Resonant Frequency	500 Hz ±20%
Resonant Frequency (100g load)	200 Hz ±20%
Stiffness	0.2 N/μm
θ roll, θ pitch (typical)	≤0.3 μrad
θ yaw (typical)	≤0.3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Al
Controller	Nano-Drive?
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-LR200 Drawing	Nano-LR200 Catalog Pages

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