Features Precision rotation: 2 mradians range Accessible and well defined axis of rotation Mount in any orientation High resolution: 4 nanoradians Closed loop control

Typical Applications Laser beam scanning Lithography FBG writing Interferometry

Product Description

The Nano-Theta is a unique piezo-actuated rotational stage having 2 milliradians of total motion. With nanoradian resolution, the Nano-Theta is designed for applications in lithography, optical disk manufacturing, and laser beam tracking or scanning. The innovative design of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror to be mounted so that it is co-planar with the axis of rotation. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with nanoradian accuracy under closed loop control.

Related Products

• Nano-Theta/H

• Nano-MTA Series

• Accessories

• Nano-Drive®